Computer Controlled Co-Deposition of Two Materials
To Form :
- Exotic Alloys (Cobalt silicide, Gold/Tin eutectic layers, etc.)
- Magnetic Thin-Films (Permalloy, Samarium/Cobalt, etc.)
- Thin-Film resistor layers such as Sichrome (Si/Cr) with very low TCR (With Ion Beam Pre-cleaning and Ion Assisted Depositions)
Simultaneous deposition of two materials, from separate, computer-controlled
sources offers high degree of flexibility to custom tailor the stoichiometry
and assures reproducibility.
This process eliminates many disadvantages, such as dissociation and
non-uniform target erosion, inherent with depositions from a single
composite target material.