Computer Controlled Co-Deposition of Two Materials

To Form :
- Exotic Alloys (Cobalt silicide, Gold/Tin eutectic layers, etc.)
- Magnetic Thin-Films (Permalloy, Samarium/Cobalt, etc.)
- Thin-Film resistor layers such as Sichrome (Si/Cr) with very low TCR (With Ion Beam Pre-cleaning and Ion Assisted Depositions)

Simultaneous deposition of two materials, from separate, computer-controlled sources offers high degree of flexibility to custom tailor the stoichiometry and assures reproducibility.
This process eliminates many disadvantages, such as dissociation and non-uniform target erosion, inherent with depositions from a single composite target material.